Polyimide-containing layer and method for etching polyimide-containing layer
The disclosure provides a polyimide-containing layer suitable for being etched by an alkaline solution and a method for etching a polyimide-containing layer. The polyimide-containing layer suitable for being etched by an alkaline solution includes 20-50 parts by weight of a silica dioxide, and 50-80 parts by weight of a polyimide.
1. A method for etching a polyimide-containing layer, comprising:
providing a polyimide-containing composition, wherein the polyimide-containing composition consists of:
a solvent selected from the group consisting of a cycloketone solvent, an amide solvent, a phenol solvent, and combinations thereof;
20-50 parts by weight of an inorganic silicon oxide having a particle size of 10-100 nm; and
50-80 parts by weight of a polyimide, wherein the inorganic silicon oxide and the polyimide are dispersed in the solvent;
coating the polyimide-containing composition on a substrate;
drying the polyimide-containing composition to form a polyimide-containing layer on the substrate; and
etching the polyimide-containing layer with an alkaline solution to completely remove the polyimide-containing layer, wherein the alkaline solution comprises water, an alkanolamine, and an alkali metal hydroxide.
2. The method as claimed in claim 1 , wherein the polyimide-containing composition has a solid content of 10-40 wt %.
3. The method as claimed in claim 1 , wherein the polyimide-containing composition has a viscosity of more than 1000 cps.
4. The method as claimed in claim 1 , wherein the weight ratio between the alkanolamine and the alkali metal hydroxide is from 1:4 to 4:1.
5. The method as claimed in claim 1 , wherein the weight percentage of the alkanolamine and alkali metal hydroxide is 20-30 wt %, based on the weight of the alkaline solution.