Assignment of Assignor's Interest

Recorded: 2013-05-29 Pages: 4

Assignors

LEVINSKI, VLADIMIR

Executed: 2013-05-19

KANDEL, DANIEL

Executed: 2013-05-19

AMIT, ERAN

Executed: 2013-05-19

Assignee

KLA-TENCOR CORPORATION

ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035

Covered Properties (3)

Device-Like Scatterometry Overlay Targets

Patent: 8,913,237 →

Application: 13/904,318 →

Publication: US 2013/0342831

Device-Like Scatterometry Targets

Application: 61/664,453 →

Device-Like Scatterometry Overlay Targets

Application: 61/792,674 →