IP Library › Patent Application 61664453
Patent Application Provisional
App. No. 61/664,453 · Confirmation No. 8986

Device-Like Scatterometry Targets

Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2012-07-10 APP.FILE.REC Filing Receipt 3 View
2012-06-26 TR.PROV Provisional Cover Sheet (SB16) 3 View
2012-06-26 SPEC Specification 4 View
2012-06-26 WFEE Fee Worksheet (SB06) 2 View
2012-06-26 N417 Electronic Filing System Acknowledgment Receipt 2 View
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Quick Facts
App. No.
61/664,453
Filed
2012-06-26