Patent Assignment
Reel/Frame 030720/0347
Assignment of Assignor's Interest
Recorded: 2013-07-01
Pages: 3
Assignee
NGK INSULATORS, LTD.
2-56, SUDA-CHO, MIZUHO-KU, NAGOYA-CITY, AICHI, 467-8530, JAPAN
Covered Property
(1)
Semiconductor Manufacturing Apparatus Member