Patent Assignment
Reel/Frame 030743/0712
Assignment of Assignor's Interest
Recorded: 2013-07-05
Pages: 4
Assignors
WANG, CHING-CHIUN
Executed: 2013-06-18
HUANG, CHIH-YUNG
Executed: 2013-06-18
LIN, KUNG-LIANG
Executed: 2013-06-18
CHIEN, JUNG-CHEN
Executed: 2013-06-18
TSAI, CHEN-DER
Executed: 2013-06-18
CHEN, CHIEN-CHIH
Executed: 2013-06-18
Assignee
INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
NO. 195, SEC. 4, CHUNG-HSING ROAD, CHU-TUNG,, HSIN-CHU, TAIWAN
Covered Property
(1)
Film Deposition Apparatus Having a Peripheral Spiral Gas Curtain