Patent Assignment
Reel/Frame 030784/0549
Assignment of Assignor's Interest
Recorded: 2013-07-12
Pages: 4
Assignors
CAO, YONG
Executed: 2013-06-26
DAITO, KAZUYA
Executed: 2013-06-26
JAKKARAJU, RAJKUMAR
Executed: 2013-06-26
TANG, XIANMIN
Executed: 2013-06-24
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Pvd Aln Film with Oxygen Doping for a Low Etch Rate Hardmask Film