Patent Assignment
Reel/Frame 031021/0950
Assignment of Assignor's Interest
Recorded: 2013-08-15
Pages: 4
Assignors
CHIMMALGI, ANANT
Executed: 2013-08-11
VORA, YOUNUS
Executed: 2013-08-06
BRUNNER, RUDOLF
Executed: 2013-08-06
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Properties
(2)
Diode Laser Based Broad Band Light Sources for Wafer Inspection Tools
Deep UV-UV-VIS-NIR Diode laser based Broad Band light sources for Wafer Inspection Tools
Application:
61/664,493 →