Patent Application
Provisional
App. No. 61/664,493
· Confirmation No. 7754
Deep UV-UV-VIS-NIR Diode laser based Broad Band light sources for Wafer Inspection Tools
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2012-07-13 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2012-06-26 | TR.PROV |
Provisional Cover Sheet (SB16) | 3 | View | |
| 2012-06-26 | SPEC |
Specification | 3 | View | |
| 2012-06-26 | DRW |
Drawings-only black and white line drawings | 2 | View | |
| 2012-06-26 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2012-06-26 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View |
Inventors
Attorneys & Agents of Record
Prosecution
- Customer No.
- 23584
- Docket No.
- P3949
- Confirmation No.
- 7754
Child
PCT
Claims priority from a provisional application
→
PCT/US2013/047901
Filed 2013-06-26
· RO PROCESSING COMPLETED-PLACED IN STORAGE
Child
Claims priority from a provisional application
→
App. 13/924,216
· US 8,896,827
Filed 2013-06-21
· Patented Case
Child
Claims priority from a provisional application
→
App. 14/521,977
· US 9,110,037
Filed 2014-10-23
· Patented Case
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2013-08-15
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Quick Facts
- App. No.
- 61/664,493
- Filed
- 2012-06-26
External Links