Patent Assignment
Reel/Frame 031021/0967
Assignment of Assignor's Interest
Recorded: 2013-08-15
Pages: 8
Assignors
NASSER-GHODSI, MEHRAN
Executed: 2013-08-12
STOKOWSKI, STANLEY E.
Executed: 2013-06-12
VAEZ-IRAVANI, MEHDI
Executed: 2013-06-12
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Properties
(2)
Apparatus and Methods for Inspecting Extreme Ultra Violet Reticles
Method for Inspecting and Improving the Quality of EUV Patterned Masks
Application:
61/659,804 →