Patent Application
Provisional
App. No. 61/659,804
· Confirmation No. 1022
Method for Inspecting and Improving the Quality of EUV Patterned Masks
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2012-07-13 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2012-06-14 | TR.PROV |
Provisional Cover Sheet (SB16) | 3 | View | |
| 2012-06-14 | SPEC |
Specification | 2 | View | |
| 2012-06-14 | DRW |
Drawings-only black and white line drawings | 2 | View | |
| 2012-06-14 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2012-06-14 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View |
Inventors
Mehran Nasser-Ghodsi
Hamilton, MA
Stanley E. Stokowski
Danville, CA
Mehdi Vaez-Iravani
Los Gatos, CA
Attorneys & Agents of Record
Prosecution
- Customer No.
- 23584
- Docket No.
- P3945
- Confirmation No.
- 1022
Child
PCT
Claims priority from a provisional application
→
PCT/US2013/044739
Filed 2013-06-07
· RO PROCESSING COMPLETED-PLACED IN STORAGE
Child
Claims priority from a provisional application
→
App. 13/905,448
· US 8,953,869
Filed 2013-05-30
· Patented Case
Child
Claims priority from a provisional application
→
App. 14/591,181
· US 9,679,372
Filed 2015-01-07
· Patented Case
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2013-08-15
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Quick Facts
- App. No.
- 61/659,804
- Filed
- 2012-06-14
External Links