Patent Assignment
Reel/Frame 031082/0228
Assignment of Assignor's Interest
Recorded: 2013-08-26
Pages: 4
Assignees
ECOLE POLYTECHNIQUE
ROUTE DE SACLAY, PALAISEAU, F-91120, FRANCE
CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE
3 RUE MICHEL-ANGE, PARIS, F-75016, FRANCE
Covered Property
(1)
Plasma Processing in a Capacitively-Coupled Reactor with Trapezoidal-Waveform Excitation