Patent Assignment
Reel/Frame 031095/0151
Assignment of Assignor's Interest
Recorded: 2013-08-27
Pages: 5
Assignors
PELLEMANS, HENRICUS PETRUS MARIA
Executed: 2013-05-29
VAN DER ZOUW, GERBRAND
Executed: 2013-05-29
ANTSIFEROV, PAVEL STANISLAVOVICH
Executed: 2013-06-03
KRIVTSUN, VLADIMIR MIHAILOVITCH
Executed: 2013-05-31
DE WIT, JOHANNES MATHEUS MARIE
Executed: 2013-05-29
SMEETS, RALPH JOZEF JOHANNES GERARDUS ANNA MARIA
Executed: 2013-05-29
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL - 5504 DR, NETHERLANDS
Covered Property
(1)
Photon Source, Metrology Apparatus, Lithographic System and Device Manufacturing Method