Patent Assignment
Reel/Frame 031109/0106
Assignment of Assignor's Interest
Recorded: 2013-08-29
Pages: 8
Assignors
HASHIMOTO, YOSHITOMO
Executed: 2013-08-20
HIROSE, YOSHIRO
Executed: 2013-08-20
SHIMAMOTO, SATOSHI
Executed: 2013-08-20
SANO, ATSUSHI
Executed: 2013-08-20
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.