Assignment of Assignor's Interest

Recorded: 2013-08-30 Pages: 2

Assignor

HAUF, MARKUS

Executed: 2010-04-14

Assignee

CARL ZEISS SMT AG

RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY

Covered Property (1)

Device for Controlling Temperature of an Optical Element

Patent: 8,632,194 →

Application: 13/676,152 →

Publication: US 2013/0088695

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.