Patent Assignment
Reel/Frame 031164/0146
Modifying Conversion
Recorded: 2013-09-05
Pages: 7
Assignor
CARL ZEISS SMT AG
Executed: 2010-10-14
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Device for Controlling Temperature of an Optical Element
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.