Patent Assignment
Reel/Frame 031133/0911
Assignment of Assignor's Interest
Recorded: 2013-09-03
Pages: 2
Assignors
SAIDO, SHUHEI
Executed: 2013-07-29
HARA, DAISUKE
Executed: 2013-07-29
SASAKI, TAKAFUMI
Executed: 2013-07-29
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Method for Manufacturing Substrate, and Method for Manufacturing Semiconductor Device
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.