Patent Assignment
Reel/Frame 031180/0861
Assignment of Assignor's Interest
Recorded: 2013-09-11
Pages: 12
Assignors
MITSUI, HIROYUKI
Executed: 2013-08-27
NISHIURA, SUSUMU
Executed: 2013-08-27
EKKO, HIROSHI
Executed: 2013-08-27
INOSHIMA, KAORI
Executed: 2013-08-27
NAKAYA, KAZUO
Executed: 2013-08-27
MORITA, OSAMU
Executed: 2013-08-27
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME,, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device, and Method of Generating Recipe
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.