Patent Assignment
Reel/Frame 031237/0792
Assignment of Assignor's Interest
Recorded: 2013-08-30
Pages: 2
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME,, CHIYODA-KU, TOKYO 1018980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Substrate Supporter and Method of Manufacturing Semiconductor Device
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.