Assignment of Assignor's Interest

Recorded: 2013-10-04 Pages: 4

Assignors

ZHANG, QIANG

Executed: 2013-08-27

LIU, YANWEI

Executed: 2013-08-27

SEZGINER, ABDURRAHMAN

Executed: 2013-08-27

Assignee

KLA-TENCOR CORPORATION

ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035

Covered Properties (2)

Wave Front Aberration Metrology of Optics of Euv Mask Inspection System

Patent: 9,335,206 →

Application: 14/010,484 →

Publication: US 2014/0063490

Test Mask for In-Situ Wave Front Aberration Metrology of Projection Optics for EUV Actinic Photomask Inspection

Application: 61/694,919 →