IP Library › Patent Application 61694919
Patent Application Provisional
App. No. 61/694,919 · Confirmation No. 3667

Test Mask for In-Situ Wave Front Aberration Metrology of Projection Optics for EUV Actinic Photomask Inspection

Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2012-09-21 APP.FILE.REC Filing Receipt 3 View
2012-08-30 TR.PROV Provisional Cover Sheet (SB16) 3 View
2012-08-30 SPEC Specification 3 View
2012-08-30 DRW Drawings-only black and white line drawings 2 View
2012-08-30 WFEE Fee Worksheet (SB06) 2 View
2012-08-30 N417 Electronic Filing System Acknowledgment Receipt 2 View
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
App. No.
61/694,919
Filed
2012-08-30