Patent Assignment
Reel/Frame 031426/0613
Assignment of Assignor's Interest
Recorded: 2013-10-17
Pages: 3
Assignor
NOMURA, MAKOTO
Executed: 2011-03-04
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME,, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Method of Controlling Substrate Processing Apparatus, Maintenance Method of Substrate Processing Apparatus and Transfer Method Performed in Substrate Processing Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.