Patent Assignment
Reel/Frame 031435/0103
Assignment of Assignor's Interest
Recorded: 2013-10-18
Pages: 5
Assignors
MAEDA, KOJI
Executed: 2013-10-08
SHIMOMOTO, HIROSHI
Executed: 2013-10-08
NAKANO, HISAJIRO
Executed: 2013-10-08
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU, TOKYO, 144-8510, JAPAN
Covered Property
(1)
Substrate Cleaning Apparatus and Polishing Apparatus