Patent Assignment
Reel/Frame 031451/0174
Assignment of Assignor's Interest
Recorded: 2013-10-22
Pages: 5
Assignor
XACTIX, INC.
Executed: 2013-09-17
Assignee
SPTS TECHNOLOGIES LIMITED
COED RHEDYN, RINGLAND WAY, NEWPORT, NP18 2TA, UNITED KINGDOM
Covered Properties
(9)
Thermal Isolation Using Vertical Structures
Patent:
6,566,725 →
Application:
09/628,201 →
Thermal Isolation Using Vertical Structures
Apparatus for Etching Semiconductor Samples and a Source for Providing a Gas by Sublimation Thereto
Etching Chamber with Subchamber
Pulsed Etching Cooling
Pulsed-Continuous Etching
Pulsed Etching Cooling
Selective Etching Of Semiconductor Substrate(s) That Preserves Underlying Dielectric Layers
High-Selectivity Etching System and Method
Application:
13/512,634 →
Publication:
US 2012/0244715
Related Assignments
(5)
Other recorded transfers of the patents in this record — the chain of ownership.
Assignment of Assignor's Interest
Dec 8, 2009
From: LEBOUITZ, KYLE S.; SPRINGER, DAVID L.
To: XACTIX, INC.
Reel/Frame 023622/0432 →
Assignment of Assignor's Interest
Oct 29, 2012
From: LEBOUITZ, KYLE S.; NEUMANN, JOHN; SPRINGER, DAVID L.; JOHNSON, ANDREW DAVID
To: XACTIX, INC.; AIR PRODUCTS AND CHEMICALS, INC.
Reel/Frame 029204/0882 →
Assignment of Assignor's Interest
Nov 12, 2012
From: AIR PRODUCTS AND CHEMICALS, INC.
To: XACTIX, INC.
Reel/Frame 029278/0249 →
Security Interest
Apr 2, 2015
From: SPTS TECHNOLOGIES LIMITED
To: JPMORGAN CHASE BANK, N.A., AS ADMINISTRATIVE AGENT
Reel/Frame 035364/0295 →
Release of Security Interest
Jul 5, 2016
From: JPMORGAN CHASE BANK, N.A.
To: SPTS TECHNOLOGIES LIMITED
Reel/Frame 039257/0026 →