Patent Assignment
Reel/Frame 031492/0786
Assignment of Assignor's Interest
Recorded: 2013-10-28
Pages: 4
Assignees
IMEC
KAPELDREEF 75, LEUVEN, 3001, BELGIUM
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method for Block-Copolymer Lithography