Patent Assignment
Reel/Frame 031660/0534
Assignment of Assignor's Interest
Recorded: 2013-11-22
Pages: 7
Assignors
SANKARAKRISHNAN, RAMPRAKASH
Executed: 2008-06-27
DUBOIS, DALE
Executed: 2008-06-26
BALASUBRAMANIAN, GANESH
Executed: 2008-06-27
JANAKIRAMAN, KARTHIK
Executed: 2008-07-07
ROCHA-ALVAREZ, JUAN CARLOS
Executed: 2008-06-27
NOWAK, THOMAS
Executed: 2008-06-27
SIVARAMAKRISHNAN, VISWESWAREN
Executed: 2008-07-15
M'SAAD, HICHEM
Executed: 2008-08-12
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Method and System for Supplying a Cleaning Gas into a Process Chamber