Patent Assignment
Reel/Frame 031684/0105
Assignment of Assignor's Interest
Recorded: 2013-11-27
Pages: 9
Assignors
KUWABARA, YUSEI
Executed: 2013-11-27
SHINDO, NOBUAKI
Executed: 2013-11-27
ISHIBASHI, SACHIE
Executed: 2013-11-27
KATO, TAKAHIKO
Executed: 2013-11-27
MAEDA, NOBORU
Executed: 2013-11-27
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus