Patent Assignment
Reel/Frame 031773/0925
Assignment of Assignor's Interest
Recorded: 2013-12-12
Pages: 6
Assignors
HARADA, KATSUYOSHI
Executed: 2013-11-28
HIROSE, YOSHIRO
Executed: 2013-11-28
SANO, ATSUSHI
Executed: 2013-11-28
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Non-Transitory Computer-Readable Recording Medium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.