Patent Assignment
Reel/Frame 031810/0151
Assignment of Assignor's Interest
Recorded: 2013-12-18
Pages: 7
Assignors
SASAJIMA, RYOTA
Executed: 2013-09-18
NAKAMURA, YOSHINOBU
Executed: 2013-09-18
OKUDA, KAZUYUKI
Executed: 2013-09-18
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.