Patent Assignment
Reel/Frame 031858/0844
Assignment of Assignor's Interest
Recorded: 2013-12-30
Pages: 3
Assignor
ISHIBASHI, TOMOATSU
Executed: 2013-12-24
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CO, OHTA-KU, TOKYO, JAPAN
Covered Property
(1)
Substrate Cleaning Apparatus