Patent Assignment
Reel/Frame 031859/0021
Assignment of Assignor's Interest
Recorded: 2013-12-30
Pages: 3
Assignor
ISHIBASHI, TOMOATSU
Executed: 2013-12-26
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU, TOKYO, JAPAN
Covered Property
(1)
Substrate Cleaning Apparatus and Substrate Cleaning Method