Patent Assignment
Reel/Frame 031864/0365
Assignment of Assignor's Interest
Recorded: 2013-12-31
Pages: 2
Assignor
OBWEGER, RAINER
Executed: 2013-09-09
Assignee
LAM RESEARCH AG
SEZ STRASSE 1, VILLACH, A-9500, AUSTRIA
Covered Property
(1)
Apparatus for Treating Surfaces of Wafer-Shaped Articles