IP Library Assignment 031975/0131
Patent Assignment
Reel/Frame 031975/0131

Assignment of Assignor's Interest

Recorded: 2014-01-15 Pages: 4
Assignors
COLVIN, NEIL
Executed: 2014-01-14
HSIEH, TSEH-JEN
Executed: 2014-01-14
Assignee
AXCELIS TECHNOLOGIES, INC.
108 CHERRY HILL DRIVE, BEVERLY, MASSACHUSETTS, 01915
Covered Property (1)
Reduced Trace Metals Contamination Ion Source for an Ion Implantation System
Patent: 9,543,110 →
Application: 14/135,754 →
Publication: US 2015/0179393
Related Assignments (2)
Other recorded transfers of the patent in this record — the chain of ownership.
Security Interest Jul 31, 2020
From: AXCELIS TECHNOLOGIES, INC.
To: SILICON VALLEY BANK, AS ADMINISTRATIVE AGENT
Reel/Frame 053375/0055 →
Release of Security Interest Apr 7, 2023
From: SILICON VALLEY BANK A DIVISION OF FIRST-CITIZENS BANK & TRUST COMPANY
To: AXCELIS TECHNOLOGIES, INC.
Reel/Frame 063270/0277 →