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Patent Assignment
Reel/Frame 031985/0478

Assignment of Assignor's Interest

Recorded: 2014-01-16 Pages: 3
Assignor
BANNEY, BEN
Executed: 2011-12-14
Assignee
ALTRAN TECHNOLOGIES
BERNHARD-WICKI-STR.3, MUENCHEN, 80636, GERMANY
Covered Property (1)
Protection Module for Euv Lithography Apparatus, and Euv Lithography Apparatus
Patent: 8,698,999 →
Application: 13/041,989 →
Publication: US 2011/0216298
Related Assignments (7)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest Jan 16, 2014
From: ALTRAN TECHNOLOGIES
To: CARL ZEISS SMT GMBH
Reel/Frame 031986/0066 →
Assignment of Assignor's Interest Jan 16, 2014
From: KELLER, FRANZ
To: UNIVERSITAET STUTTGART
Reel/Frame 031986/0236 →
Assignment of Assignor's Interest Jan 16, 2014
From: ULRICH NIEKEN
To: UNIVERSITAET STUTTGART
Reel/Frame 031986/0302 →
Assignment of Assignor's Interest Jan 16, 2014
From: UNIVERSITAET STUTTGART
To: CARL ZEISS SMT GMBH
Reel/Frame 031986/0480 →
Assignment of Assignor's Interest Jan 16, 2014
From: KUGLER, JENS
To: CARL ZEISS SMT GMBH
Reel/Frame 031986/0572 →
Assignment of Assignor's Interest Jan 16, 2014
From: LAUFER, TIMO
To: CARL ZEISS SMT GMBH
Reel/Frame 031986/0649 →
Assignment of Assignor's Interest Jan 16, 2014
From: EHM, DIRK HEINRICH
To: CARL ZEISS SMT GMBH
Reel/Frame 031986/0727 →