Patent Assignment
Reel/Frame 031986/0236
Assignment of Assignor's Interest
Recorded: 2014-01-16
Pages: 3
Assignor
KELLER, FRANZ
Executed: 2013-01-20
Assignee
UNIVERSITAET STUTTGART
BOEBLINGER STRASSE 72, STUTTGART, 70199, GERMANY
Covered Property
(1)
Protection Module for Euv Lithography Apparatus, and Euv Lithography Apparatus
Related Assignments
(7)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Jan 16, 2014
From: BANNEY, BEN
To: ALTRAN TECHNOLOGIES
Reel/Frame 031985/0478 →
Assignment of Assignor's Interest
Jan 16, 2014
From: ALTRAN TECHNOLOGIES
To: CARL ZEISS SMT GMBH
Reel/Frame 031986/0066 →
Assignment of Assignor's Interest
Jan 16, 2014
From: ULRICH NIEKEN
To: UNIVERSITAET STUTTGART
Reel/Frame 031986/0302 →
Assignment of Assignor's Interest
Jan 16, 2014
From: UNIVERSITAET STUTTGART
To: CARL ZEISS SMT GMBH
Reel/Frame 031986/0480 →
Assignment of Assignor's Interest
Jan 16, 2014
From: KUGLER, JENS
To: CARL ZEISS SMT GMBH
Reel/Frame 031986/0572 →
Assignment of Assignor's Interest
Jan 16, 2014
From: LAUFER, TIMO
To: CARL ZEISS SMT GMBH
Reel/Frame 031986/0649 →
Assignment of Assignor's Interest
Jan 16, 2014
From: EHM, DIRK HEINRICH
To: CARL ZEISS SMT GMBH
Reel/Frame 031986/0727 →