Patent Assignment
Reel/Frame 031986/0066
Assignment of Assignor's Interest
Recorded: 2014-01-16
Pages: 3
Assignor
ALTRAN TECHNOLOGIES
Executed: 2011-11-11
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Protection Module for Euv Lithography Apparatus, and Euv Lithography Apparatus
Related Assignments
(7)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Jan 16, 2014
From: BANNEY, BEN
To: ALTRAN TECHNOLOGIES
Reel/Frame 031985/0478 →
Assignment of Assignor's Interest
Jan 16, 2014
From: KELLER, FRANZ
To: UNIVERSITAET STUTTGART
Reel/Frame 031986/0236 →
Assignment of Assignor's Interest
Jan 16, 2014
From: ULRICH NIEKEN
To: UNIVERSITAET STUTTGART
Reel/Frame 031986/0302 →
Assignment of Assignor's Interest
Jan 16, 2014
From: UNIVERSITAET STUTTGART
To: CARL ZEISS SMT GMBH
Reel/Frame 031986/0480 →
Assignment of Assignor's Interest
Jan 16, 2014
From: KUGLER, JENS
To: CARL ZEISS SMT GMBH
Reel/Frame 031986/0572 →
Assignment of Assignor's Interest
Jan 16, 2014
From: LAUFER, TIMO
To: CARL ZEISS SMT GMBH
Reel/Frame 031986/0649 →
Assignment of Assignor's Interest
Jan 16, 2014
From: EHM, DIRK HEINRICH
To: CARL ZEISS SMT GMBH
Reel/Frame 031986/0727 →