Patent Assignment
Reel/Frame 032051/0788
Assignment of Assignor's Interest
Recorded: 2014-01-27
Pages: 4
Assignee
NUFLARE TECHNOLOGY, INC.
8-1, SHIN SUGITA CHO, ISOGO-KU, YOKOHAMA, KANAGAWA, 235-8522, JAPAN
Covered Property
(1)
Vapor Phase Growth Apparatus Having Shower Plate with Multi Gas Flow Passages and Vapor Phase Growth Method Using the Same