Patent Assignment
Reel/Frame 032109/0520
Assignment of Assignor's Interest
Recorded: 2014-01-31
Pages: 5
Assignors
HATAKEYAMA, JUN
Executed: 2013-12-25
OGIHARA, TSUTOMU
Executed: 2013-12-25
BIYAJIMA, YUSUKE
Executed: 2013-12-25
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OHTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Pattern Forming Process