Patent Assignment
Reel/Frame 032161/0569
Assignment of Assignor's Interest
Recorded: 2014-02-06
Pages: 4
Assignors
WUISTER, SANDER FREDERIK
Executed: 2012-01-27
KRIVTSUN, VLADIMIR MIHAILOVITCH
Executed: 2012-01-27
YAKUNIN, ANDREI MIKHAILOVICH
Executed: 2012-01-27
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL-5504 DR, NETHERLANDS
Covered Property
(1)
Lithographic Patterning Process and Resists to Use Therein