Patent Assignment
Reel/Frame 032175/0341
Assignment of Assignor's Interest
Recorded: 2014-02-07
Pages: 3
Assignors
HUMAYUN, RAASHINA
Executed: 2014-01-30
MANANDHAR, SUDHA
Executed: 2014-01-30
DANEK, MICHAL
Executed: 2014-02-03
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Tungsten Deposition Process Using Germanium-Containing Reducing Agent