Patent Assignment
Reel/Frame 032193/0853
Assignment of Assignor's Interest
Recorded: 2014-02-11
Pages: 2
Assignors
MORI, MASAHITO
Executed: 2014-01-30
HIRATA, AKIRA
Executed: 2014-01-30
YAMAMOTO, KOICHI
Executed: 2014-01-30
ARASE, TAKAO
Executed: 2014-01-30
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORATION
24-14, NISHI SHIMBASHI 1-CHOME, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Method for Controlling Plasma Processing Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.