Patent Assignment
Reel/Frame 032216/0978
Assignment of Assignor's Interest
Recorded: 2014-02-14
Pages: 2
Assignors
YAMAZAKI, SHUNPEI
Executed: 2010-10-19
TAKAYAMA, TORU
Executed: 2010-10-25
SATO, KEIJI
Executed: 2010-10-26
Assignee
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
398, HASE, ATSUGI-SHI, KANAGAWA-KEN, 243-0036, JAPAN
Covered Property
(1)
Sputtering Target and Manufacturing Method Thereof, and Transistor