Patent Assignment
Reel/Frame 032247/0715
Assignment of Assignor's Interest
Recorded: 2014-02-19
Pages: 6
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Raw Material Gas Supply Method