Patent Assignment
Reel/Frame 032318/0260
Assignment of Assignor's Interest
Recorded: 2014-02-27
Pages: 2
Assignors
TETSUKA, TSUTOMU
Executed: 2014-02-05
SATAKE, MAKOTO
Executed: 2014-02-05
KAWAGUCHI, TADAYOSHI
Executed: 2014-02-06
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORATION
24-14, NISHI SHIMBASHI 1-CHOME, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Plasma Processing Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.