Patent Assignment
Reel/Frame 032361/0185
Assignment of Assignor's Interest
Recorded: 2014-03-06
Pages: 5
Assignors
LIU, CHENG-HSIUNG
Executed: 2014-02-25
HSU, CHUN-HAO
Executed: 2014-02-25
PENG, YU-YUN
Executed: 2014-02-26
YAO, CHIH-YUAN
Executed: 2014-02-25
SHEN, CHIA-I
Executed: 2014-02-26
LIN, KENG-CHU
Executed: 2014-02-25
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITED
NO. 8, LI-HSIN ROAD 6, HSIN-CHU SCIENCE PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Pumping Liner for Chemical Vapor Deposition