Patent Assignment
Reel/Frame 032461/0723
Assignment of Assignor's Interest
Recorded: 2014-03-18
Pages: 5
Assignors
HAYASHI, KONOSUKE
Executed: 2014-02-24
FURUYA, MASAAKI
Executed: 2014-02-24
OOTAGAKI, TAKASHI
Executed: 2014-02-24
NAGASHIMA, YUJI
Executed: 2014-02-24
KINASE, ATSUSHI
Executed: 2014-02-24
ABE, MASAHIRO
Executed: 2014-02-24
Assignee
SHIBAURA MECHATRONICS CORPORATION
5-1, KASAMA 2-CHOME, SAKAE-KU, YOKOHAMA-SHI, KANAGAWA, JAPAN
Covered Property
(1)
Substrate Processing Device and Substrate Processing Method