Substrate processing device and substrate processing method
A substrate processing device includes a suction drying section drying a surface of a substrate by absorbing and removing a liquid droplet of volatile solvent formed on the surface of the substrate by a heating operation of a heating section.
1. A substrate processing device comprising:
a processing chamber having a substrate inlet/outlet opening,
a table provided in the processing chamber, and supporting a substrate horizontally,
a rotation section rotating the table in a horizontal plane,
a cleaning liquid supplying section having a cleaning liquid nozzle supplying a cleaning liquid to a patterned surface of the substrate which is rotated by the rotation section;
a solvent supplying section having a solvent nozzle supplying a volatile solvent in a liquid state to the patterned surface of the substrate rotated by the rotation section and supplied with the cleaning liquid, to replace the cleaning liquid on the patterned surface of the substrate with the volatile solvent;
a suction drying section;
a heating section heating the substrate supplied with the volatile solvent,
which includes a lamp, by which the patterned surface of the substrate can be heated and a gas layer of the volatile solvent can be formed thereon, and the gas layer can push the liquid volatile solvent so that it changes into droplets which can be sucked by the suction drying section; and
a cup surrounds a periphery of the table so as to accommodate the table therein,
wherein the suction drying section has a solvent suction discharging section including a solvent suction port which is located radially inward from the cup and has an annular opening surrounding the periphery of the table,
the solvent suction port is movable between an operation position to suck the liquid droplets and a standby position,
the suction drying section dries the surface of the substrate held by the table by removing the volatile solvent from the surface of the substrate according to sucking the liquid droplets of volatile solvent by the solvent suction port located at the operation position, in combination with a heating operation of the heating section, and
both of the cleaning liquid nozzle and the solvent nozzle are provided in a side wall of the cup on the periphery of the cup, wherein the substrate inlet/outlet opening is provided in a side wall of the processing chamber, and wherein the cleaning liquid nozzle and the solvent nozzle are located in the side wall of the cup at a position opposite the location of the substrate inlet/outlet opening in the side wall of the processing chamber.
2. The substrate processing device according to claim 1 , further comprising:
a substrate rotation drying section drying the surface of the substrate by dispersing and removing the liquid droplets of the volatile solvent formed on the surface of the substrate by rotating the substrate.
3. The substrate processing device according to claim 1 , wherein
the volatile solvent is any one of IPA, univalent alcohols, ethers, or ethylene carbonate.
4. The substrate processing device according to claim 1 , further comprising a moving section which moves the heating section vertically.
5. The substrate processing device according to claim 1 , wherein
the suction drying section, when the solvent suction port of the solvent suction discharging section is in the operation position, sucks the volatile solvent supplied from the solvent suppling section to the rotating substrate and dispersing from the substrate, as well as sucks the volatile solvent supplied from the solvent suppling section to the rotating substrate and formed into the liquid droplets produced by the heating section.
6. The substrate processing device according to claim 1 , wherein
the heating section heats the substrate rotated by the rotation section, and
the suction drying section sucks the droplets of the volatile solvent formed on the patterned surface of the substrate rotated by the rotation section.
7. The substrate processing device according to claim 1 , wherein
the heating section heats the substrate which stops its rotation, and
the suction drying section sucks the droplets of the volatile solvent formed on the patterned surface of the substrate by the heating of the heating section.
8. A substrate processing method comprising:
supplying a cleaning liquid to a surface of a substrate;
supplying a volatile solvent to the surface of the substrate supplied with the cleaning liquid to replace the cleaning liquid on the surface of the substrate with the volatile solvent;
heating the substrate supplied with the volatile solvent; and
drying the surface of the substrate by absorbing and removing liquid droplets of the volatile solvent formed on the surface of the substrate by heating of the substrate,
wherein the substrate processing method is carried out with the substrate processing device according to claim 1 .
9. The substrate processing method according to claim 8 , further comprising:
drying the surface of the substrate by blowing off and removing the liquid droplets of the volatile solvent formed on the surface of the substrate by the heating of the substrate.
10. The substrate processing method according to claim 8 , further comprising:
performing drying by dispersing and removing the liquid droplets of the volatile solvent formed by heating of the substrate on the surface of the substrate by rotating the substrate.
11. A substrate processing method comprising:
supplying a cleaning liquid to a surface of a substrate;
supplying a volatile solvent to the surface of the substrate supplied with the cleaning liquid to replace the cleaning liquid on the surface of the substrate with the volatile solvent;
heating the substrate supplied with the volatile solvent; and
drying the surface of the substrate by blowing off and removing liquid droplets of the volatile solvent formed on the surface of the substrate by heating of the substrate,
wherein the substrate processing method is carried out with the substrate processing device according to claim 1 .
12. The substrate processing method according to claim 11 , further comprising:
performing drying by dispersing and removing the liquid droplets of the volatile solvent formed by heating of the substrate on the surface of the substrate by rotating the substrate.