Patent Assignment
Reel/Frame 032476/0104
Assignment of Assignor's Interest
Recorded: 2014-03-19
Pages: 7
Assignors
KASAI, SHIGERU
Executed: 2014-02-24
IKEDA, TARO
Executed: 2014-02-24
FUJINO, YUTAKA
Executed: 2014-02-24
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and Shower Plate