Patent Assignment
Reel/Frame 032572/0912
Assignment of Assignor's Interest
Recorded: 2014-04-01
Pages: 7
Assignors
HSIAO, RU-SHANG
Executed: 2014-03-11
CHANG, CHIH-FU
Executed: 2014-03-11
WANG, JEN-PAN
Executed: 2014-03-11
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, HSIN-CHU SCIENCE PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Air-Gap Scheme for Beol Process