Patent Assignment
Reel/Frame 032637/0588
Assignment of Assignor's Interest
Recorded: 2014-04-09
Pages: 9
Assignors
NODA, TAKAAKI
Executed: 2014-04-02
SHIMAMOTO, SATOSHI
Executed: 2014-03-27
NOHARA, SHINGO
Executed: 2014-03-31
HIROSE, YOSHIRO
Executed: 2014-03-27
MAEDA, KIYOHIKO
Executed: 2014-04-01
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.