Patent Assignment
Reel/Frame 032841/0627
Assignment of Assignor's Interest
Recorded: 2014-05-07
Pages: 3
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL-5504 DR, NETHERLANDS
Covered Property
(1)
Mountings for Rotation of Array of Reflective Elements and Lithographic Apparatus Incorporating Same